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Semiconductor Processing

The semiconductor sector is one of the fastest growing industry segments in the global economy today.  More and more high-tech electronic devices are incorporated into ever more electronics products today, ranging from cars to home appliances to military products.  The ability to simulate subcomponents such as integrated circuits, MEMS, and process equipment of these electronic products is critical to the product developers in this sector to sustain this growth. 
 
ESI Group provides advanced simulation tools and services for designing and optimizing semiconductor equipment and processes. Our commercially available multi-physics software package CFD-ACE+ provides the unique capacity to perform high fidelity three-dimensional simulations of heat and mass transport with complex multi-step gas-phase and surface reactions for semiconductor applications such as:

  • Chemical Vapor Deposition (CVD) Processes
  • Physical Vapor Deposition (PVD) Processes
  • Etching Processes
  • Plasma Enhanced Processes
  • Feature Scale Evolution
  • Epitaxy Processes
  • Electrodeposition / Electroplating Processes
  • Thermal Oxidation Processes
  • Cleaning Processes
  • Photolithography Processes
  • Crystal Growth Processes
  • Wafer Treatments
  • Chip Processing
  • Clean Room / Clean Equipment