Training Catalogue

 
Fluid Dynamics
CFD-ACE+ Plasma Training
Reference: CFD-AP-A

Level: Advanced
Duration: 2 days
Audience: Mechanical, Chemical and Plasma engineers with a basic understanding of CFD-ACE+
Objectives: Learn to model real-world plasma discharge/process in a way that is physically proper and numerically attractable
Prerequisites: Working knowledge of CFD-ACE+ tools
Description: This course presents the modeling of Capacitively Coupled Plasma (CCP) and Inductively Coupled Plasma (ICP) reactors with hands-on exercises as well as an introduction to feature scale modeling with CFD-TOPO.
Course content:

Day 1, AM:

* Overview of Plasma Applications and Modeling

  • Plasma types and applications
  • Introduction to Plasma Modeling
  • Basic Equations of the Plasma Fluid Model
  • Simplification for Inductively Coupled Plasma
  • Plasma Gas-Phase Chemistry
  • Plasma Surface Chemistry
  • Diffusivity and Mobility
  • Neutral Gas Heating by Plasma
  • Ion Surface Heating

* CFD-ACE database

 

Day 1, PM:

* Tutorial 1: CFD-ACE+ Plasma Modeling of 2D CCP Reactor

  • Problem Type
  • Model Options
  • Volume Conditions
  • Boundary Conditions
  • Initial Conditions
  • Solver Control
  • Output
  • Run and Monitor
  • DTF update through Model.in
  • View and Analyze results using CFD-VIEW

* Discussion and Further Exercises in CCP

  • Ion Momentum Equation
  • Cross-Section Based Electron Collision
  • Fixed CCP power

 

Day 2, AM:

* Introduction to Kinetic Modeling

  • Hierarchy of Transport Models for Electrons
  • 4-D Fokker-Planck Equation
  • CFD-ACE+ Kinetic model definition
  • Plasma Coefficients by Kinetic

* Tutorial 2: Modeling of 2-D Axisymmetric SiO2 Deposition Process in SiH4/O2/Ar ICP Reactor

  • Problem Type 
  • Model Options
  • Volume Conditions
  • Boundary Conditions
  • Initial Conditions
  • Solver Control
  • Output
  • Run and Monitor
  • DTF update through Model.in
  • View and Analyze results using CFD-VIEW

* Discussion and Further Exercises in ICP

  • Thermal Flux Balance BC for Te
  • Fixed ICP Power
  • Ion Kinetic Energy + Joule Heating for Gas
Day 2, PM:

Introduction to feature Scale Modeling with CFD-TOPO and its Coupling with Reactor Scale

OPEN TIME: Discussions, Q & A Session and work on models provided by the trainees (students are highly encouraged to bring their own cases)
Schedules:

Location: ESI Group, Santa Clara, CA, USA
Scheduled on demand
Registration:

Please contact your local Training Coordinator for further information and to register for this course.